Bruker OM-DektakXT Profilometer

Profilometry is a surface profiler, which quantifies surface roughness, thickness, and stress properties of materials. Its capabilities are diverse, in which it can measure film thicknesses from sub nanometer to 1 mm with angstrom repeatability.

The Bruker DektakXT profilometer uses a diamond stylus with a 2 um diameter in contact and with a constant force on the surface. The sample laterally moves while the profilometer measures the displacement of the stylus. The software can also scan the sample to produce a topographical image and has the capability to stitch images together to have a scan range of 200mm.